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Home > e-beam inspection
2014-05-23

KLA-Tencor: Wafer Defect Detection Inspection Trends

Optic inspection is still the mainstream wafer defect detection method in the inspection and metrology field, while E-beam will continue to be a niche market, said KLA-Tencor Chief Marketing Officer Brian Trafas during the opening ceremony of the new training facility held at the company’s Hsinchu branch on May 23, 2014.
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