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Home > Close Coupled Showerhead
2017-08-01

San’an Optoelectronics qualifies AIXTRON Showerhead Reactor for production of Deep UV LEDs

AIXTRON SE, a worldwide leading provider of deposition equipment to the semiconductor industry, announced today that globally leading Chinese optoelectronics manufacturer San’an has successfully completed the qualification of AIXTRON’s novel Close Coupled Showerhead (CCS) process chamber designed for the production of Deep Ultra Violet (DUV) LEDs.
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