GaN, the “Black Technology” in the compound semiconductor market, can largely reduce product size thanks to its high power and high density. The compound also maintains excellent properties under high-frequency, high-temperature and high-voltage circumstances. The increasing demand for GaN in 5G/6G, renewable energy and electric vehicle markets will boost the material’s value in the context of consumer electronics and related industrial chains. GaN is going to be the next-gen “superstar” in the semiconductor industry. The Department of Industri...

Oxford Instruments Plasma Technology (OIPT) announced that it has worked with Taiwan’s Industrial Technology Research Institute (ITRI) by providing multiple PlasmaPro 100 systems including both etch and deposition for ITRI’s Micro LED R&D program. The PlasmaPro 100 ICP process solutions are designed to support leading edge device applications such as Lasers, RF, Power and advanced LEDs. ITRI has been developing Micro LED technology since 2009. In 2018, with the cooperation with Macroblock, Unimicron and PlayNitrid...

University of Magdeburg, Germany has placed an order for a PlasmaPro System100 ICP180 etch tool from UK-based Oxford Instruments plc. The university will utilize the system to run GaN on Si etch processes to facilitate its power semiconductor and HBLED research. GaN on Si offers a step change in technology for the HBLED and power semiconductor device markets. Through lower cost and larger diameter substrates the overall cost of devices can be dramatically reduced. Etching forms a vital part of the device manufacturing process and with the PlasmaPro100-...

Oxford Instruments has received multi-system order of its etch and deposition systems from HBLED Manufacturer, Optogan Group. These etch and deposition systems include PlasmaPro System133 ICP and PlasmaPro 800Plus RIE etch systems, and a PlasmaPro 800Plus deposition system. The PlasmaPro System133 process tool offers up to 27 x 2" batch etch capability for GaN on Sapphire wafers, while the PlasmaPro 800Plus tools are a flexible solution for plasma etching and deposition processes on large wafer batches of up to 43 x 2" wafers, in a compact ...