2013-05-17

Valence Process Equipment Unveils New MOCVD System GaN-500

Valence Process Equipment, Inc. (VPE) has announced the commercial release of the VPE GaN-500 MOCVD system, a new metal organic chemical vapor deposition (MOCVD) system for production of high-brightness light emitting diodes (LEDs). The VPE system includes a reactor that is designed around a novel (patent pending) chamber and gas-injector, resulting in the highly efficient use of pre-cursor gases. The system has a capacity of 59 two-inch wafers with a future upgrade path to 72 two-inch or 20 four-inch wafers. Frank Campanale, CEO of VPE, commented: ...
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